In-situ deposition and MR-transport setup 'small MBE'


The 'small MBE' system is a UHV system with pressures below 10^-10 mbar.

It is used for the deposition of high-quality thin films carried out under UHV conditions to ensure high purity of the used materials.

Subsequent to deposition samples can be characterized in-situ without transferring them to air with an implemented MR measurement setup. An external magnetic field (H = 1000 Oe) can be swept around 360° with respect to the plane of the sample surface.

The chamber is equipped with a cryostat that allows to reduce the sample temperature down to 77K.

Currently the system is used for in-situ electromigration studies of nano-scale constrictions.